CURRENT RATES			FUTURE RATES- TO BE ADVISED
Rate (name)	Unit Base	Internal	Rate (name)	Unit Base	Internal
SAMPLE PREP ROOM ACCESS	hr	2
CLEANROOM ACCESS	hr	3
THERMAL PROCESSES	hr	4
AFM	hr	9
LOW RESOLUTION SEM	hr	9
SEM	hr	34
EDS	hr	5
TEM	hr	48
XRD	hr	24
DSC	hr	22
SDT	hr	14
FIB	hr	44
Ebeam Lithography	hr	47
Photolithography  [1 hr. min]	hr	7
Laser Lithography UPG101	hr	10
Parylene Coating	hr	10
RIE   [1 hr. min]	hr	10
Ashing	hr	7
PVD; Sputtering [base metals]	hr	20
PVD; Evaporation [base metals]	hr	13
RTA  [1 hr. min]	hr	6
Sample coating [Au]	per cycle(3 min cycle)	9
Sample coating [C]	per cycle(3 min cycle)	8
Wedge Bonder	hr	14
Cutting Laser	hr	23
Training	hr	11
Engineering Services	hr	36
Analytical Services	hr	39
Tool Operation/Gen. Labor	hr	45
Omniprobe	hr	26
PECVD	hr	38
3D printing	hr	10
Dicing saw	hr	15
STS DRIE	hr	41

Please contact the Recharge Center for external rates.