CURRENT RATES			FUTURE RATES- TO BE ADVISED
Rate (name)	Unit Base	Internal	Rate (name)	Unit Base	Internal
SAMPLE PREP ROOM ACCESS	hr	4
CLEANROOM ACCESS	hr	5
THERMAL PROCESSES	hr	6
AFM	hr	12
LOW RESOLUTION SEM	hr	12
SEM	hr	40
EDS	hr	8
TEM	hr	63
XRD	hr	30
DSC	hr	29
SDT	hr	19
FIB	hr	57
Ebeam Lithography	hr	60
Photolithography  [1 hr. min]	hr	10
Laser Lithography UPG101	hr	15
Parylene Coating	hr	12
RIE   [1 hr. min]	hr	12
Ashing	hr	10
PVD; Sputtering [base metals]	hr	27
PVD; Evaporation [base metals]	hr	15
RTA  [1 hr. min]	hr	8
Sample coating [Au]	per cycle(3 min cycle)	12
Sample coating [C]	per cycle(3 min cycle)	12
Wedge Bonder	hr	19
Cutting Laser	hr	15
Training	hr	15
Engineering Services	hr	47
Analytical Services	hr	50
Tool Operation/Gen. Labor	hr	57
uHardness tester	hr	37
Omniprobe	hr	36
PECVD	hr	48
3D printing	hr	15
Dicing saw	hr	18
STS DRIE	hr	38

Please contact the Recharge Center for external rates.